 sangwq
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dff905345f
增加PMB的兼容
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2 years ago |
 lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
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2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
lixiang
|
62f1a16025
1.添加PartialPressure界面
|
2 years ago |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
lixiang
|
ccb4444fa8
添加部分ui按钮控制rt功能
|
2 years ago |
|
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
lixiang
|
782eafc783
1.添加log配置文件功能
|
3 years ago |
|
sangwq
|
9760d40cf7
port simulator
|
3 years ago |
