 hecl
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f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
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10 months ago |
 zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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10 months ago |
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hecl
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1a56dd552c
fix bugs
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10 months ago |
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hecl
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e2836bfbda
1.Chamber DE process enhance
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10 months ago |
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hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 months ago |
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zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 months ago |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 months ago |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
