 lixiang
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e81e8a5c12
IoSensor和管路 优化
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10 months ago |
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lixiang
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9163903164
Kepler2200优化
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10 months ago |
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lixiang
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c671c999c0
ui界面优化
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11 months ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 months ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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11 months ago |
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lixiang
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7513d2e586
TM View 添加wafer
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11 months ago |
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lixiang
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8d613c7d1f
奈思UI 新版动画
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11 months ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
 hecl
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0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
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1 year ago |
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hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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6d84fd8e38
修复UI LP2/LP3不能工作 bug
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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ed84923822
OverView界面Abort绑定System.IsBusy
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1 year ago |
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lixiang
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5e8bf0ff14
1.重绘window窗体
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1 year ago |
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lixiang
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038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
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1 year ago |
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lixiang
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cfed419b0a
解决ValueTuple版本冲突
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1 year ago |
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lixiang
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5c995238da
1.修复kepler流气模拟器bug
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1 year ago |
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lixiang
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c3f0679404
UI界面添加Pause/Resume功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
 zhouhr
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187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
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1 year ago |
