 zhouhr
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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il y a 1 an |
 lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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il y a 1 an |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
 sangwq
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a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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il y a 1 an |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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il y a 1 an |
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lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
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il y a 1 an |
 chenkui
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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il y a 1 an |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
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il y a 1 an |
|
lixiang
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f09d7d1b15
分开所有系列配置文件
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il y a 1 an |
