 lixiang
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f92e6abb17
1.添加Kepler2300 功能代码
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9 months ago |
 zhouhr
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dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
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11 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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1 year ago |
|
lixiang
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e29f6e8e46
1.优化UI界面性能
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1 year ago |
|
lixiang
|
46d2717838
1.Gas Leak Check 加上Penning Guage信号显示
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1 year ago |
|
lixiang
|
5e9ddc918f
优化SequenceView界面
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1 year ago |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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1 year ago |
|
lixiang
|
1c2b8b53bb
1.添加用户权限功能
|
1 year ago |
|
lixiang
|
b67769ec2c
ui优化
|
1 year ago |
|
zhouhr
|
eff7f8a03e
upload missing files
|
1 year ago |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
lixiang
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
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1 year ago |
|
zhouhr
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 year ago |
|
lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 year ago |
 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
hecl
|
d15749f5b1
1.fix VenusSE show chiler temp bugs
|
1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
|
1 year ago |
|
lixiang
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
1 year ago |
|
lixiang
|
e3ab321150
添加TM IO界面
|
1 year ago |
|
lixiang
|
0f905564d0
加入登录界面和权限管理
|
1 year ago |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
