 lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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2 years ago |
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lixiang
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5139f41e19
添加PM Abort 下拉菜单功能
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2 years ago |
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lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
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lixiang
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1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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2 years ago |
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lixiang
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9f512c69c9
优化efem动画
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2 years ago |
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lixiang
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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2 years ago |
 zhouhr
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2bcfec21f1
修改以兼容kepler2300 recipe 修改recipe界面中chuck dechuck出现的时机 补充选项中的空值
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
