 lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
 hecl
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4b1a37ee73
fix bugs
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1 year ago |
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hecl
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f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
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1 year ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 year ago |
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hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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1 year ago |
 zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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1 year ago |
|
lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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1 year ago |
|
hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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1 year ago |
|
zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 year ago |
|
zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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1 year ago |
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lixiang
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4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
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1 year ago |
|
lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
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1 year ago |
|
lixiang
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 year ago |
 sangwq
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9189e1b51f
new routing algorithm update.
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1 year ago |
|
lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 year ago |
|
lixiang
|
ef3841f212
atm模式移除PM控压
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1 year ago |
|
lixiang
|
5c995238da
1.修复kepler流气模拟器bug
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1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
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1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
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1 year ago |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
1 year ago |
