 zhouhr
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37bbeb95df
Add the configuration item QueryAWCOption to determine whether TMRobot AWC collects data && Add TMRobot Pick query AWC
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hai 1 ano |
|
zhouhr
|
ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
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hai 1 ano |
 sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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hai 1 ano |
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sangwq
|
8f9b95ae8f
Develop transfer cycle.
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hai 1 ano |
 lixiang
|
1a9114214b
robot place 删除测试代码
|
hai 1 ano |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
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hai 1 ano |
|
lixiang
|
072e5d0d01
ui Module TM 名变TMRobot
|
hai 1 ano |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
hai 1 ano |
|
sangwq
|
2663cfc1d9
Add place/pick delay.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
ed992dd631
Enhance the Log Info
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
|
b741650da1
TM Cycle ready.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
44ec74603f
TM Transfer
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
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%!s(int64=2) %!d(string=hai) anos |
