 lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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2 years ago |
|
lixiang
|
20cc441578
1.kepler2200 ui优化
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2 years ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
 sangwq
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16f00701e5
Redesign Recipe module.
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2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
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2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
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2 years ago |
|
lixiang
|
62f1a16025
1.添加PartialPressure界面
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2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
|
sangwq
|
0606b882bc
process module 1215
|
2 years ago |
|
lixiang
|
896c7407de
优化log功能
|
3 years ago |
|
sangwq
|
3cad102221
更新 RT
|
3 years ago |
