 hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
 zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
zhouhr
|
2bcfec21f1
修改以兼容kepler2300 recipe 修改recipe界面中chuck dechuck出现的时机 补充选项中的空值
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1 year ago |
 lixiang
|
f3bd6b016b
添加部分efem功能
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1 year ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
 sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
f8cec9a940
epd files missing.
|
2 years ago |
