 sangwq
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210098481b
fix the routing bug which missing calling RouteTo().
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1 year ago |
|
sangwq
|
d9a23a44a2
ChamberType dismatch.
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1 year ago |
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sangwq
|
f1d081394f
introduce the chamber type/Temperature to SchedulerPM
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1 year ago |
|
sangwq
|
b85b9aa79f
fix some routing bugs.
|
1 year ago |
 chenkui
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25f21eaf52
1、fixed PortWaferStart notify event parameter carrierId is null
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1 year ago |
 lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 year ago |
|
chenkui
|
49d9d6dd18
1、fixed ControlState Data;
|
1 year ago |
|
chenkui
|
cc41474996
1、add WaferStart sequenceId information
|
1 year ago |
|
chenkui
|
7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
|
1 year ago |
|
chenkui
|
d4a031af0e
1、change PortWaferstart/PortWaferEnd event to WaferArrived/WaferLeved event
|
1 year ago |
|
chenkui
|
563a30f852
1、add recipe event notify;
|
1 year ago |
|
chenkui
|
e66b927c1a
1、fixed PMA and PMC send message twice bug
|
1 year ago |
|
chenkui
|
ba5ff5cd67
1、Simulator datagrid keep last log;
|
1 year ago |
|
chenkui
|
022b90d66b
1、fixed simulator memory overflow bug
|
1 year ago |
|
lixiang
|
6d84fd8e38
修复UI LP2/LP3不能工作 bug
|
1 year ago |
|
sangwq
|
3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.
|
1 year ago |
|
lixiang
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 year ago |
|
chenkui
|
20cbcb4b9a
1、cancel simulator timer update property
|
1 year ago |
|
chenkui
|
e1b1642096
1、fixed socket simulator memory overflow exception
|
1 year ago |
|
chenkui
|
b2769d4638
1、fixed serial port simulator memory overflow exception
|
1 year ago |
|
sangwq
|
709c7a1c10
fixed the routing bug while B In B Out.
|
1 year ago |
 hecl
|
d15749f5b1
1.fix VenusSE show chiler temp bugs
|
1 year ago |
|
chenkui
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
|
1 year ago |
|
lixiang
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
1 year ago |
|
sangwq
|
614fe9104b
Transfer PM wafer while PMTask status not update to idle.
|
1 year ago |
|
sangwq
|
78ec8de62c
fix the bug which pm wafer been transfer out without processed.
|
1 year ago |
|
sangwq
|
045dc856c8
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 year ago |
