 lixiang
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df2593530e
1.提交cycle功能
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1 year ago |
 sangwq
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ec6ba70d8e
Parallel routing algorithm for kepler/venus.
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1 year ago |
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sangwq
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5469baaa63
Parallel cycle mode
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1 year ago |
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sangwq
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1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.
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1 year ago |
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sangwq
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1d60dcb593
Fix the bugs about Exclude/Include feature.
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1 year ago |
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sangwq
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9d5c9aa491
Reset PMTask while after system abort.
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1 year ago |
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sangwq
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1ff7394c30
Fix the ATM cycle blocking bug.
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1 year ago |
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sangwq
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03770198be
Skip auto Vent/pump while ATM mode.
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1 year ago |
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sangwq
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5d9198550f
Enhance the throughput with align sequence.
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1 year ago |
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sangwq
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54ed40c8b1
enhance kepler throughput
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1 year ago |
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sangwq
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82703d4497
enhance throughput with loadlock delay.
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1 year ago |
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sangwq
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57281fce55
Enhance throughput while not pass by aligner.
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1 year ago |
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sangwq
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f53fecc7bb
Enhance sequence aligner configurability
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1 year ago |
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sangwq
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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1 year ago |
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sangwq
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fe230ec531
Enhance throughput.
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1 year ago |
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sangwq
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
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sangwq
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2de3872723
duplicated wafer function.
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1 year ago |
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sangwq
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52349cad2b
Duplicated wafer functions.
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1 year ago |
|
lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
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sangwq
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e8ae7ee302
fix the Loadlock path bug while fixed slot mode.
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1 year ago |
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sangwq
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408e8f0786
enhance the throughput while loadlock is fixed slot pattern.
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1 year ago |
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sangwq
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89d1b63b12
fix the bug which missing calling RouteTo on Vac side.
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1 year ago |
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sangwq
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9cdf232cb1
Fix the routing bug for fixed slot Loadlock.
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1 year ago |
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sangwq
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b11dfcec1e
Load configure value for Loadlock slot in out option.
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1 year ago |
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sangwq
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a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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1 year ago |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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sangwq
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210098481b
fix the routing bug which missing calling RouteTo().
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1 year ago |
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sangwq
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b85b9aa79f
fix some routing bugs.
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1 year ago |
|
lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
 chenkui
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d4a031af0e
1、change PortWaferstart/PortWaferEnd event to WaferArrived/WaferLeved event
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1 year ago |
