 zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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11 月之前 |
 lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 年之前 |
 hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
1 年之前 |
|
lixiang
|
ef3841f212
atm模式移除PM控压
|
1 年之前 |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 年之前 |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 年之前 |
 sangwq
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5b037046f9
Add TM/LL modules.
|
2 年之前 |
|
lixiang
|
a268651d10
1.添加configview和部分mfcverificationview
|
2 年之前 |
