Commit History

Author SHA1 Message Date
  lixiang 6447434c5b Venus代码删除 6 months ago
  zhouhr b6309f712c upload for Venus SE/DE 8 months ago
  lixiang 33d0cd73dd 1.修复Pump Counter 显示错误bug 10 months ago
  lixiang 99d939492e 1.加登出界面 11 months ago
  lixiang ced69ea3b9 新版本Recioeview界面开发 11 months ago
  zhouhr 7a07ffa5ca 1. add SignalTower for Venus System by VenusSignalTower.xml 1 year ago
  lixiang 5ce110574e 1,添加cooling功能 1 year ago
  lixiang 3fb3984bd3 1.添加 Heater 伺服到位信号,手臂进腔前check 1 year ago
  lixiang a4f8a29122 1.Kepler2200 Gas 改造,六路变八路 1 year ago
  lixiang d33079596b 1.优化新版跑片动画 1 year ago
  hecl 9d28f8ee7d 1.Add Tru match 1 year ago
  lixiang 01dafac8f1 1.Kepler2200 添加Home 设备断开重连功能 1 year ago
  lixiang 552d60ca99 1.Stable与Tolerance 功能优化 1 year ago
  lixiang 4634f3f91a 1。设置log最大500M,超出分文件(解决文件太大,log打不开) 1 year ago
  lixiang 7e15cb64a0 1.Recipe 添加 Stable/OverEtch 功能 1 year ago
  lixiang 87f1121180 1.Recipe UI 界面Name优化 1 year ago
  hecl c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 year ago
  lixiang 2cbab729fb 添加小标题 home/online/offineInclude/Exclude功能 1 year ago
  lixiang 1929a3510b 1.新版ui界面开发 1 year ago
  lixiang 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 year ago
  lixiang 68b4ba9640 1.添加mtorr与Pa切换功能 1 year ago
  lixiang 33ba42d9ef 1.添加RT关闭同时关闭钟摆阀和RF的功能 1 year ago
  lixiang 4338503e2a 1.添加霍庭格RF Device 1 year ago
  lixiang 818383115c UI优化 1 year ago
  zhouhr 3e18a3a534 Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine 1 year ago
  lixiang c0ff9f251e 1.添加kepler2200B 1 year ago
  lixiang e511d1f387 1.添加PM控压功能 1 year ago
  lixiang 6d7ee9b8a3 1.根据新版kepler2200A IO跟新kepler2200A PM功能 1 year ago
  lixiang 62feaac5e7 1.优化跑片动画 1 year ago
  lixiang 894ff76d5e online/offline tobview状态颜色变化 1 year ago