 hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 月之前 |
 sangwq
|
5b6817486a
enhance Venus dispatcher module.
|
11 月之前 |
|
sangwq
|
98c6162bf2
fix the atm cycle bug.
|
11 月之前 |
|
sangwq
|
7bf784cc5a
New routing algorithm for Venus SE/DE system.
|
11 月之前 |
 zhouhr
|
7b69f42c04
fix the bug in DE-ReadyForPickStatus
|
11 月之前 |
|
zhouhr
|
2e70549fc8
fix bug in StationNumber(Aligner1)
|
11 月之前 |
|
zhouhr
|
6e3aa49351
fix bug in SEMFPlaceRoutine
|
11 月之前 |
|
zhouhr
|
632f566bc6
fix bug in SEMFSwapRoutine
|
11 月之前 |
|
zhouhr
|
6cd541ac40
fix the bug in SE Pick/Place Routine
|
11 月之前 |
|
zhouhr
|
cc04adb731
change the location of the PA from VPA to Aligner1
|
11 月之前 |
|
zhouhr
|
1f725dcb61
fix bug in VCE2LP
|
11 月之前 |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
|
11 月之前 |
 lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 月之前 |
|
sangwq
|
2edb43d393
fix the crash issue.
|
11 月之前 |
|
sangwq
|
f8336dc16b
fix the crash issue in SETMScheduler.
|
11 月之前 |
|
sangwq
|
bcbd783654
avoid crash issue for temporary fix.
|
11 月之前 |
|
sangwq
|
75b6c4548e
submit new venus routing algorithm.
|
11 月之前 |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
11 月之前 |
|
zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
11 月之前 |
|
lixiang
|
34958e5963
swap 压差计算log测试
|
11 月之前 |
|
lixiang
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
|
11 月之前 |
|
lixiang
|
9e9459c927
efem界面按钮功能优化
|
11 月之前 |
|
lixiang
|
5a4c70257b
1.Recipe 添加给eap recipe的内容
|
11 月之前 |
|
lixiang
|
c671c999c0
ui界面优化
|
11 月之前 |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 月之前 |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 月之前 |
|
sangwq
|
1ff7394c30
Fix the ATM cycle blocking bug.
|
11 月之前 |
|
sangwq
|
03770198be
Skip auto Vent/pump while ATM mode.
|
11 月之前 |
|
sangwq
|
5d9198550f
Enhance the throughput with align sequence.
|
11 月之前 |
|
zhouhr
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
11 月之前 |
