 lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 months ago |
 hecl
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0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 months ago |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
|
lixiang
|
52e8bd8f7a
1.优化Home断开重连
|
1 year ago |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 year ago |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
lixiang
|
0f905564d0
加入登录界面和权限管理
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1 year ago |
|
lixiang
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
lixiang
|
6910d4754e
代码合并
|
1 year ago |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 year ago |
|
lixiang
|
ab095ba2a8
修复钟摆阀状态错误bug
|
1 year ago |
|
lixiang
|
41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能
|
1 year ago |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
1 year ago |
|
lixiang
|
4992e94a4e
代码提交
|
1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 year ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
1 year ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
 sangwq
|
096c873956
Sequence SPEC update.
|
2 years ago |
|
lixiang
|
1759ebd070
修改rf ui
|
2 years ago |
