 zhouhr
|
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
|
1 year ago |
 lixiang
|
a9d8e56970
1.扩展alarm list
|
1 year ago |
|
lixiang
|
b67769ec2c
ui优化
|
1 year ago |
|
lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
|
1 year ago |
|
zhouhr
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
1 year ago |
|
lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 year ago |
 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 year ago |
|
lixiang
|
cfed419b0a
解决ValueTuple版本冲突
|
1 year ago |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 year ago |
|
lixiang
|
f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列，避免数据包丢失
|
2 years ago |
|
lixiang
|
894ff76d5e
online/offline tobview状态颜色变化
|
2 years ago |
 sangwq
|
2694bdc96c
Enhance the Pre-rotation function
|
2 years ago |
|
sangwq
|
baeae1636e
TM Robot PreRotation function for particle and throughput issues.
|
2 years ago |
|
zhouhr
|
0ed42d17d1
fix bugs for WaferOffset
|
2 years ago |
|
zhouhr
|
b2e38c8ff3
Add unuploaded files
|
2 years ago |
|
zhouhr
|
ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
|
2 years ago |
|
lixiang
|
46aa26403c
优化压差开siltdoor功能
|
2 years ago |
 Intern01
|
261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
|
2 years ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
2 years ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
2 years ago |
|
sangwq
|
f6ac5e975e
Siasun robot new line chars are "\r\n"
|
2 years ago |
|
lixiang
|
93b4531b7b
robot 不能home问题提交
|
2 years ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
