 lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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1 year ago |
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lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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1 year ago |
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lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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1 year ago |
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lixiang
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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1 year ago |
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lixiang
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8e660cd7a8
1.去除carrierid ;字符
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1 year ago |
 sangwq
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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1 year ago |
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lixiang
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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sangwq
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4f7a01400f
fix the sync issue for efem socket.
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1 year ago |
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sangwq
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cc43a1d632
enhance the EFEM driver.
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1 year ago |
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sangwq
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7862a9be38
solve the sync problem while set signal tower light.
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1 year ago |
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lixiang
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75dbbd4da8
添加KeplerSignaltower功能
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1 year ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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lixiang
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cfed419b0a
解决ValueTuple版本冲突
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列，避免数据包丢失
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2 years ago |
 zhouhr
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5a02e70af1
fix jetefem bug
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2 years ago |
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zhouhr
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d396d70f90
fix JetEfem bug
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2 years ago |
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zhouhr
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1c44773767
Add missing files
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2 years ago |
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zhouhr
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1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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2 years ago |
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sangwq
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052baa3ed3
fix the clear error command confirm sequence problem and PM pressure bug.
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2 years ago |
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zhouhr
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4c7076a950
change FSM when EFEM receives the error message
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2 years ago |
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zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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2 years ago |
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lixiang
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00d42e8c17
efem动画优化
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2 years ago |
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lixiang
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5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
 Intern01
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261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
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2 years ago |
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sangwq
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c223835b1e
enhance AutoCycle module.
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2 years ago |
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Intern01
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aaff066e93
EFEM Align UI RT 更新
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2 years ago |
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lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
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sangwq
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9f239420d8
improve the efem code.
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2 years ago |
