 zhouhr
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dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
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11 meses atrás |
|
zhouhr
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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1 ano atrás |
|
zhouhr
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149c7ce2e9
add AutoPump before StartJob && AutoUnLoad after JobDone && VCELoad Without PumpDown
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1 ano atrás |
|
zhouhr
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b6309f712c
upload for Venus SE/DE
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1 ano atrás |
|
zhouhr
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3b9c2c346d
1. add missing item in SE/DE Sccfg
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1 ano atrás |
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zhouhr
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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1 ano atrás |
|
zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 ano atrás |
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zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 ano atrás |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 ano atrás |
|
zhouhr
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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1 ano atrás |
 lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 ano atrás |
|
lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 ano atrás |
 sangwq
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a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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1 ano atrás |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 ano atrás |
|
lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 ano atrás |
 chenkui
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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1 ano atrás |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
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1 ano atrás |
|
lixiang
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f09d7d1b15
分开所有系列配置文件
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1 ano atrás |
