 lixiang
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10c22069fe
1.添加EFEM光栅报警开关
|
8 mesi fa |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
8 mesi fa |
|
lixiang
|
e29f6e8e46
1.优化UI界面性能
|
10 mesi fa |
|
lixiang
|
5e9ddc918f
优化SequenceView界面
|
10 mesi fa |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
|
10 mesi fa |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
10 mesi fa |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 anno fa |
|
lixiang
|
08ec6feef2
1.优化数据分析界面颜色选择bug
|
1 anno fa |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 anno fa |
 hecl
|
8e5ec35137
Add tansfer checkpage add fix bug about show step
|
1 anno fa |
|
lixiang
|
edb5ad6960
1.添加数据分析 Recipe step功能
|
1 anno fa |
 Intern01
|
4d950d1f31
Fix some bugs about PM process data
|
1 anno fa |
|
lixiang
|
b1e6a9ce63
bug提交
|
1 anno fa |
|
Intern01
|
9c618d6866
DataHistory&&ProcessDataHistory update
|
1 anno fa |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
2 anni fa |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 anni fa |
|
lixiang
|
e9951fa64d
1.添加efem/sequence等界面
|
2 anni fa |
|
lixiang
|
ec1eeba67c
添加数据分析界面
|
2 anni fa |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
2 anni fa |
