 zhouhr
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4666252058
补充recipe界面不显示heliumpump的问题
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7 months ago |
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zhouhr
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b6309f712c
upload for Venus SE/DE
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7 months ago |
 lixiang
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1c2b8b53bb
1.添加用户权限功能
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10 months ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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10 months ago |
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zhouhr
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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11 months ago |
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lixiang
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99d939492e
1.加登出界面
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11 months ago |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 year ago |
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lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 year ago |
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lixiang
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5a4c70257b
1.Recipe 添加给eap recipe的内容
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1 year ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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1 year ago |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 year ago |
 hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
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hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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lixiang
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87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
|
zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
|
lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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7c5d66a96d
右击wafer报错bug修复
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1 year ago |
|
lixiang
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894ff76d5e
online/offline tobview状态颜色变化
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1 year ago |
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lixiang
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a2426eb90b
Recipe 添加bias step ramp设值功能
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1 year ago |
|
lixiang
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0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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1 year ago |
