 zhouhr
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b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
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9 maanden geleden |
|
zhouhr
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4666252058
补充recipe界面不显示heliumpump的问题
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9 maanden geleden |
|
zhouhr
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fd27ba4304
handle some bug.
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9 maanden geleden |
|
zhouhr
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b6309f712c
upload for Venus SE/DE
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9 maanden geleden |
 lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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9 maanden geleden |
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lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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9 maanden geleden |
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lixiang
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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10 maanden geleden |
 chenkui
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9ffd49dd2d
update pp-select object[] to string[] bug
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10 maanden geleden |
 sangwq
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bcb1461e22
Routing bug while single PM and double arm running.
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10 maanden geleden |
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sangwq
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3a49881f33
fix the typing error.
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10 maanden geleden |
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sangwq
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81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
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10 maanden geleden |
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sangwq
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e12c5e5a93
fixed the blocking bug while return wafers.
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10 maanden geleden |
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chenkui
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4edd963b4b
update S2F13 ECID
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10 maanden geleden |
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sangwq
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d449c55208
Force Loadlock cooling while return wafer.
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10 maanden geleden |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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10 maanden geleden |
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chenkui
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e874919d1b
update ECID
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10 maanden geleden |
|
chenkui
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9c5f7f760b
修复LP.State状态取至IsLoaded
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11 maanden geleden |
|
chenkui
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665c6d15f7
增加了Loadport AccessModel和State
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11 maanden geleden |
|
chenkui
|
9332919378
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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11 maanden geleden |
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lixiang
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8e660cd7a8
1.去除carrierid ;字符
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11 maanden geleden |
|
chenkui
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b7e39609e8
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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11 maanden geleden |
|
chenkui
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9e1392f800
update eap dll
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11 maanden geleden |
|
lixiang
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d6b8d32004
1.修复不能跑atm模式的bug
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11 maanden geleden |
|
lixiang
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a9d8e56970
1.扩展alarm list
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11 maanden geleden |
|
chenkui
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f93181401a
upload kelper warning id
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11 maanden geleden |
|
chenkui
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c7f9243ef5
add S1F11,S1F15,S1F17 and S2F29 command & add client connection log
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11 maanden geleden |
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sangwq
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a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
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11 maanden geleden |
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lixiang
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3dd6dc62ed
修复OperationView PM显示错误bug
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11 maanden geleden |
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sangwq
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a5826caf14
Pre/Post Lot Clean functionality.
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11 maanden geleden |
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lixiang
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e29f6e8e46
1.优化UI界面性能
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11 maanden geleden |
