upload kelper warning id

Venus/Venus_RT/Config/EquipmentVariables.xml

@@ -3071,17 +3071,177 @@
     <DataVariable id="10002" valueType="I4" logicalName="PortTransferState" eventTrigger="" />
   </DataVariables>
   <AlarmVariables>
-    <AlarmVariable id="10101001" logicalName="ERR_MATCH" description="match报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101002" logicalName="ERR_RF" description="RF 报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101003" logicalName="ERR_PENDULUM_VALVE" description="钟摆阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101004" logicalName="ERR_DEVICE_INFO" description="设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101005" logicalName="ERR_DRY_PUMP" description="干泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101006" logicalName="ERR_HighTemperatureHeater" description="Heater报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101007" logicalName="ERR_PM_TOLERANCE" description="工艺过程中Tolerance 报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101008" logicalName="ERR_PROCESS" description="PM process过程报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101009" logicalName="ERR_ROUTINE_FAILED" description="routine 报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101010" logicalName="ERR_RFBox" description="RF Box报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
-    <AlarmVariable id="10101011" logicalName="ERR_TM_ROBOT" description="TM Robot报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101001" logicalName="ERR_LOGOFF_ERROR" description="注销用户发生异常" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101002" logicalName="ERR_UPDATE_PW_ERROR" description="修改账号的密码失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101003" logicalName="ERR_DELETE_USER_ERROR" description="删除账号发生异常" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101004" logicalName="ERR_UPDATE_USER_ERROR" description="更新账号资料发生异常" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101005" logicalName="ERR_WCF_OPEN_ERROR" description="wcf未能打开" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101006" logicalName="ERR_ROUTINE_FAILED" description="例程失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101007" logicalName="ERR_SIGNAL_TOWER_UNDEFINE" description="未定义信号" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101008" logicalName="ERR_SIGNAL_TOWER_INVALID_CFG" description="信号塔配置文件设置无效报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101009" logicalName="ERR_PLC_HEARTBEAT_FAIL" description="心跳停止,判PLC运行失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101010" logicalName="ERR_DEVICE_INFO" description="设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+    <AlarmVariable id="10101011" logicalName="ERR_EXCEPTION" description="设备异常报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101012" logicalName="ERR_WAFER_MANAGER_FAILED" description="晶圆管理失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101013" logicalName="ERR_FSM_FAILED" description="FSM失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101014" logicalName="ERR_ROUTER" description="状态机报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101015" logicalName="ERR_SEQUENCE" description="序列失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101016" logicalName="ERR_INTERLOCK_FAIL" description="互锁失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101017" logicalName="ERR_DEVICE_ENTITY" description="设备状态机错误" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101028" logicalName="ERR_EFEM_COMMON_FAILED" description="EFEM报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101029" logicalName="ERR_EFEM_ROBOT" description="EFEM机器人报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101030" logicalName="ERR_EFEM_VAC_SOURCE_PRESSURE_LOW" description="EFEM报错解析，压力低" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101031" logicalName="ERR_EFEM_IONIZER_COMPRESSED_AIR" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101032" logicalName="ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101033" logicalName="ERR_EFEM_FLOW_GUAGE_SENSOR" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101034" logicalName="ERR_EFEM_LEAKAGE" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101035" logicalName="ERR_EFEM_IONIZER" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101036" logicalName="ERR_EFEM_FFU" description="EFEM报错解析，ffu" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101037" logicalName="ERR_EFEM_SWITCH_TO_MAINTAIN_MODE" description="EFEM报错解析，维护模式" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101056" logicalName="ERR_TM_ROBOT" description="TM机器人报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101057" logicalName="ERR_TM" description="TM报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101058" logicalName="ERR_TM_HEARTBEAT" description="TM PLC心跳停止" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101059" logicalName="ERR_TM_ROBOT_PICKSLOTOVERRANGE" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101060" logicalName="ERR_TM_ROBOT_PLACESLOTOVERRange" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101061" logicalName="ERR_TM_ROBOT_SETINTLOCKWAF_SEN" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101062" logicalName="ERR_TM_ROBOT_SETINTLOCKRZ" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101063" logicalName="ERR_TM_ROBOT_SETINTLOCK" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101064" logicalName="ERR_TM_ROBOT_SETIOECHO" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101065" logicalName="ERR_TM_ROBOT_SETIOSTATE " description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101066" logicalName="ERR_TM_PUPMCONNECT" description="TM 干泵连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101067" logicalName="ERR_TM_LeakCheck" description="TM漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101068" logicalName="ERR_TM_LL_PressureDifference" description="TM LL压差过大，不能开门" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101069" logicalName="ERR_TM_PM_PressureDifference" description="TM PM压差过大，不能开门" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101084" logicalName="ERR_LLA_PUPMCONNECT" description="LLA 干泵连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101085" logicalName="ERR_LLB_PUPMCONNECT" description=" LLB 干泵连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101086" logicalName="ERR_LLA_MFC1FLOWOVERRANGE" description="LLA 流气超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101087" logicalName="ERR_LLB_MFC1FLOWOVERRANGE" description="LLB 流气超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101088" logicalName="ERR_LLA_MFCPRESSURE" description="LLA 压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101089" logicalName="ERR_LLB_MFCPRESSURE" description="LLB 压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101090" logicalName="ERR_LLA_LeakCheck" description="LLA漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101091" logicalName="ERR_LLB_LeakCheck" description="LLB漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101092" logicalName="ERR_LLA_Vent" description="LLA vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101093" logicalName="ERR_LLA_PumpDown" description="LLA pumpdown失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101094" logicalName="ERR_LLB_Vent" description="LLB vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101095" logicalName="ERR_LLB_PumpDown" description="LLB pumpdown失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101100" logicalName="ERR_PMA_DEVICE_IO_HEATER" description="IO加热报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101101" logicalName="ERR_PMA_DRY_PUMP" description="干泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101102" logicalName="ERR_PMA_PENDULUM_VALVE" description="钟摆阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101103" logicalName="ERR_PMA_ESC_HV" description="ESC高压告警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101104" logicalName="ERR_PMA_TURBO_PUMP" description="分子泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101105" logicalName="ERR_PMA_RF" description="射频报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101106" logicalName="ERR_PMA_DEVICE_CHILLER" description="冷水机报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101107" logicalName="ERR_PMA_ENDPOINT" description="EPD设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101108" logicalName="ERR_PMA_BACKSIDE_HE" description="氦气报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101109" logicalName="ERR_PMA_PROCESS" description="过程报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101110" logicalName="ERR_PMA_IoGasValve" description="气体阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101111" logicalName="ERR_PMA_PM" description="腔体报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101112" logicalName="ERR_PMA_Sensor" description="传感器报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101113" logicalName="ERR_PMA_IO_VALVE" description="IO阀门报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101114" logicalName="ERR_PMA_MATCH" description="射频匹配报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101115" logicalName="ERR_PMA_RFBox" description="RF Box报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101116" logicalName="ERR_PMA_HighTemperatureHeater" description="高温加热器错误" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101117" logicalName="ERR_PMA_PM_TOLERANCE" description="PM误差报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101118" logicalName="ERR_PMA_HEARTBEAT" description=" PLC心跳停止" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101119" logicalName="ERR_PMA_RF_Connect" description="RF连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101120" logicalName="ERR_PMA_RF_WaterFlow" description="开RF Water flow条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101121" logicalName="ERR_PMA_RF_RFGInterlock" description="开RF PLC interlock条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101122" logicalName="ERR_PMA_RF_GASOFF" description="流气关闭，RF自动关闭" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101123" logicalName="ERR_PMA_PV_INTERLOCK_FORELINRPRESSURE" description="开钟摆阀，foreline压力不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101124" logicalName="ERR_PMA_PV_INTERLOCK_TURBOPUMPNOTATSPEED" description="开钟摆阀，turbo 速度条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101125" logicalName="ERR_PMA_PV_PARITY" description="钟摆阀报错parity" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101126" logicalName="ERR_PMA_MFC_MFC1FLOWOVERRANGE" description="mfc1流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101127" logicalName="ERR_PMA_MFC_MFC2FLOWOVERRANGE" description="mfc2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101128" logicalName="ERR_PMA_MFC_MFC3FLOWOVERRANGE" description="mfc3流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101129" logicalName="ERR_PMA_MFC_MFC4FLOWOVERRANGE" description="mfc4流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101130" logicalName="ERR_PMA_MFC_MFC5FLOWOVERRANGE" description="mfc5流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101131" logicalName="ERR_PMA_MFC_MFC6FLOWOVERRANGE" description="mfc6流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101132" logicalName="ERR_PMA_MFC_MFC7FLOWOVERRANGE" description="mfc7流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101133" logicalName="ERR_PMA_MFC_MFC8FLOWOVERRANGE" description="mfc8流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101134" logicalName="ERR_PMA_MFC_N2FLOWOVERRANGE" description="N2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101135" logicalName="ERR_PMA_MFC1_PRESSURE" description="mfc1压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101136" logicalName="ERR_PMA_MFC2_PRESSURE" description="mfc2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101137" logicalName="ERR_PMA_MFC3_PRESSURE" description="mfc3压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101138" logicalName="ERR_PMA_MFC4_PRESSURE" description="mfc4压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101139" logicalName="ERR_PMA_MFC5_PRESSURE" description="mfc5压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101140" logicalName="ERR_PMA_MFC6_PRESSURE" description="mfc6压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101141" logicalName="ERR_PMA_MFC7_PRESSURE" description="mfc7压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101142" logicalName="ERR_PMA_MFC8_PRESSURE" description="mfc8压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101143" logicalName="ERR_PMA_N2_PRESSURE" description="N2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101144" logicalName="ERR_PMA_HighTemperatureHeater_SetRatio_OverRange" description="Heater set ratio 超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101145" logicalName="ERR_PMA_HighTemperatureHeater_SetTemperature_OverRange" description="Heater set 温度超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101146" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition1TimeOut" description="Heater去位置1超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101147" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition2TimeOut" description="Heater去位置2超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101148" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition3TimeOut" description="Heater去位置3超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101149" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition4TimeOut" description="Heater去位置4超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101150" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition5TimeOut" description="Heater去位置5超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101151" logicalName="ERR_PMA_HighTemperatureHeater_TransferPosition" description="pick/place heater不在传送位置" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101152" logicalName="ERR_PMA_HighTemperatureHeater_LiftDriverAlarm" description="plc heater driver报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101153" logicalName="ERR_PMA_HighTemperatureHeater_LiftPosiModuleAlarm" description="heater lift 位置报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101154" logicalName="ERR_PMA_HighTemperatureHeater_LiftORGAlarm" description="heater lift 原点报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101155" logicalName="ERR_PMA_HighTemperatureHeater_GoOriginTimeOut" description="Heater 去原点超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101156" logicalName="ERR_PMA_LeakCheck" description="漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101157" logicalName="ERR_PMA_Vent" description="Vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101158" logicalName="ERR_PMA_PumpDown" description="pump down失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101176" logicalName="ERR_PMB_DEVICE_IO_HEATER" description="IO加热报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101177" logicalName="ERR_PMB_DRY_PUMP" description="干泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101178" logicalName="ERR_PMB_PENDULUM_VALVE" description="钟摆阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101179" logicalName="ERR_PMB_ESC_HV" description="ESC高压告警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101180" logicalName="ERR_PMB_TURBO_PUMP" description="分子泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101181" logicalName="ERR_PMB_RF" description="射频报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101182" logicalName="ERR_PMA_DEVICE_CHILLER" description="冷水机报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101183" logicalName="ERR_PMB_ENDPOINT" description="EPD设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101184" logicalName="ERR_PMB_BACKSIDE_HE" description="氦气报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101185" logicalName="ERR_PMB_PROCESS" description="过程报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101186" logicalName="ERR_PMB_IoGasValve" description="气体阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101187" logicalName="ERR_PMB_PM" description="腔体报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101188" logicalName="ERR_PMB_Sensor" description="传感器报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101189" logicalName="ERR_PMB_IO_VALVE" description="IO阀门报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101190" logicalName="ERR_PMB_MATCH" description="射频匹配报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101191" logicalName="ERR_PMB_RFBox" description="RF Box报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101192" logicalName="ERR_PMB_HighTemperatureHeater" description="高温加热器错误" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101193" logicalName="ERR_PMB_PM_TOLERANCE" description="PM误差报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101194" logicalName="ERR_PMB_HEARTBEAT" description=" PLC心跳停止" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101195" logicalName="ERR_PMB_RF_Connect" description="RF连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101196" logicalName="ERR_PMB_RF_WaterFlow" description="开RF Water flow条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101197" logicalName="ERR_PMB_RF_RFGInterlock" description="开RF PLC interlock条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101198" logicalName="ERR_PMB_RF_GASOFF" description="流气关闭，RF自动关闭" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101199" logicalName="ERR_PMB_PV_INTERLOCK_FORELINRPRESSURE" description="开钟摆阀，foreline压力不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101200" logicalName="ERR_PMB_PV_INTERLOCK_TURBOPUMPNOTATSPEED" description="开钟摆阀，turbo 速度条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101201" logicalName="ERR_PMB_PV_PARITY" description="钟摆阀报错parity" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101202" logicalName="ERR_PMB_MFC_MFC1FLOWOVERRANGE" description="mfc1流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101203" logicalName="ERR_PMB_MFC_MFC2FLOWOVERRANGE" description="mfc2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101204" logicalName="ERR_PMB_MFC_MFC3FLOWOVERRANGE" description="mfc3流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101205" logicalName="ERR_PMB_MFC_MFC4FLOWOVERRANGE" description="mfc4流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101206" logicalName="ERR_PMB_MFC_MFC5FLOWOVERRANGE" description="mfc5流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101207" logicalName="ERR_PMB_MFC_MFC6FLOWOVERRANGE" description="mfc6流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101208" logicalName="ERR_PMB_MFC_MFC7FLOWOVERRANGE" description="mfc7流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101209" logicalName="ERR_PMB_MFC_MFC8FLOWOVERRANGE" description="mfc8流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101210" logicalName="ERR_PMB_MFC_N2FLOWOVERRANGE" description="N2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101211" logicalName="ERR_PMB_MFC1_PRESSURE" description="mfc1压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101212" logicalName="ERR_PMB_MFC2_PRESSURE" description="mfc2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101213" logicalName="ERR_PMB_MFC3_PRESSURE" description="mfc3压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101214" logicalName="ERR_PMB_MFC4_PRESSURE" description="mfc4压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101215" logicalName="ERR_PMB_MFC5_PRESSURE" description="mfc5压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101216" logicalName="ERR_PMB_MFC6_PRESSURE" description="mfc6压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101217" logicalName="ERR_PMB_MFC7_PRESSURE" description="mfc7压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101218" logicalName="ERR_PMB_MFC8_PRESSURE" description="mfc8压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101219" logicalName="ERR_PMB_N2_PRESSURE" description="N2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101220" logicalName="ERR_PMB_HighTemperatureHeater_SetRatio_OverRange" description="Heater set ratio 超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101221" logicalName="ERR_PMB_HighTemperatureHeater_SetTemperature_OverRange" description="Heater set 温度超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101222" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition1TimeOut" description="Heater去位置1超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101223" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition2TimeOut" description="Heater去位置2超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101224" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition3TimeOut" description="Heater去位置3超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101225" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition4TimeOut" description="Heater去位置4超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101226" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition5TimeOut" description="Heater去位置5超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101227" logicalName="ERR_PMB_HighTemperatureHeater_TransferPosition" description="pick/place heater不在传送位置" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101228" logicalName="ERR_PMB_HighTemperatureHeater_LiftDriverAlarm" description="plc heater driver报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101229" logicalName="ERR_PMB_HighTemperatureHeater_LiftPosiModuleAlarm" description="heater lift 位置报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101230" logicalName="ERR_PMB_HighTemperatureHeater_LiftORGAlarm" description="heater lift 原点报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101231" logicalName="ERR_PMB_HighTemperatureHeater_GoOriginTimeOut" description="Heater 去原点超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101232" logicalName="ERR_PMB_LeakCheck" description="漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101233" logicalName="ERR_PMB_Vent" description="Vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
+	<AlarmVariable id="10101234" logicalName="ERR_PMB_PumpDown" description="pump down失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
   </AlarmVariables>
   <Reports>
     <Report id="1" logicalName="HostDefinedReport_1">