 Intern01
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dfc9174ac8
VenusSE TM PM Simulator Update
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1 rok temu |
 lixiang
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5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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1 rok temu |
 zhouhr
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ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
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1 rok temu |
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lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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1 rok temu |
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lixiang
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a5813eb09d
1.修改chamber wafer样式
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1 rok temu |
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lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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1 rok temu |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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1 rok temu |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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2 lat temu |
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lixiang
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 lat temu |
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lixiang
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 lat temu |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 lat temu |
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lixiang
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bb33e89998
1，优化UI界面
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2 lat temu |
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lixiang
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7a6556869f
1.整理主界面UI
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2 lat temu |
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lixiang
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3b8277256c
1.recipeHead添加expand
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2 lat temu |
 sangwq
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847220c6ce
update for initial recipe design
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2 lat temu |
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sangwq
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3f9c41937a
update for event module enhancement
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2 lat temu |
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lixiang
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782eafc783
1.添加log配置文件功能
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2 lat temu |
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sangwq
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3cad102221
更新 RT
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2 lat temu |
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lixiang
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8582fd7e94
Venus初始版本提交
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2 lat temu |
