 lixiang
|
b253c8fadd
1.添加旋转动画
|
2 years ago |
|
lixiang
|
0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
|
2 years ago |
|
lixiang
|
f1c36cc209
添加提交
|
2 years ago |
|
lixiang
|
5139f41e19
添加PM Abort 下拉菜单功能
|
2 years ago |
|
lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
|
2 years ago |
|
lixiang
|
d26cf018d7
修复自动计算c1c2值bug
|
2 years ago |
|
lixiang
|
20cc441578
1.kepler2200 ui优化
|
2 years ago |
|
lixiang
|
ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
|
2 years ago |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 years ago |
 zhouhr
|
bcc9d2faf8
1、Chamber add the waferID
|
2 years ago |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
|
2 years ago |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
|
2 years ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
2 years ago |
