 sangwq
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a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
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11 months ago |
 lixiang
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3dd6dc62ed
修复OperationView PM显示错误bug
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11 months ago |
|
sangwq
|
a5826caf14
Pre/Post Lot Clean functionality.
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11 months ago |
|
lixiang
|
e29f6e8e46
1.优化UI界面性能
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11 months ago |
|
lixiang
|
46d2717838
1.Gas Leak Check 加上Penning Guage信号显示
|
11 months ago |
|
lixiang
|
5e9ddc918f
优化SequenceView界面
|
11 months ago |
|
lixiang
|
abc6ebc8ff
修复Topview显示不正确bug，添加给eap穿eventenum功能
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11 months ago |
|
lixiang
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
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11 months ago |
|
lixiang
|
6794b3d2d7
修复Sequence View bug
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11 months ago |
|
lixiang
|
1c62310360
修复Suquence打开修改界面报空bug
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11 months ago |
|
lixiang
|
477c4954ad
1.添加CarrierId
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11 months ago |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
|
11 months ago |
|
lixiang
|
bfd7d2def6
手动添加冲突bug 代码
|
11 months ago |
|
lixiang
|
1c2b8b53bb
1.添加用户权限功能
|
11 months ago |
|
sangwq
|
87cdf166a0
restore the dispatcher version which been broken by source merge.
|
11 months ago |
|
sangwq
|
5b961e44db
fix blocking issue while no wafer waiting in LL.
|
11 months ago |
|
lixiang
|
fe62e9a11b
优化 Process History界面，添加分页，避免查询，内存飙升
|
11 months ago |
|
lixiang
|
2a29981f11
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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11 months ago |
 chenkui
|
2241125f83
fixed EquipmentVariables.xml eventset cannot be empty
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11 months ago |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
11 months ago |
|
chenkui
|
b59880dc23
add EquipmentVariables.xml alarmId
|
11 months ago |
|
sangwq
|
9e65346638
Fixed the blocking bug after one control job abort and restart.
|
1 year ago |
|
sangwq
|
679a0eb967
fix the blocking bug while In loadlock is empty.
|
1 year ago |
|
sangwq
|
98cc9d6be7
Fixed the blocking bug after error PM restored.
|
1 year ago |
|
sangwq
|
1f85177a1a
Manual return PM wafer function while error happen.
|
1 year ago |
|
lixiang
|
74af7f21c4
冲突解决，合并代码
|
1 year ago |
|
lixiang
|
b67769ec2c
ui优化
|
1 year ago |
 zhouhr
|
3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
|
1 year ago |
|
zhouhr
|
3b9c2c346d
1. add missing item in SE/DE Sccfg
|
1 year ago |
|
lixiang
|
65d80057c2
ui优化
|
1 year ago |
