 sangwq
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e64484a52f
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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1 year ago |
 lixiang
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530ddcbae7
优化topview界面
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1 year ago |
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sangwq
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c9282deeeb
EFEM Driver and simulator functions.
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1 year ago |
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lixiang
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3be4fea304
优化传片动画
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1 year ago |
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lixiang
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9231cab4b9
1.修改topView ui
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1 year ago |
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sangwq
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f211c4242f
Efem module raw design.
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1 year ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
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sangwq
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39dd3fa41f
Enable Com debug log.
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1 year ago |
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sangwq
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ed992dd631
Enhance the Log Info
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1 year ago |
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sangwq
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dff905345f
增加PMB的兼容
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1 year ago |
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sangwq
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66557b65bb
TMCycle not finished.
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1 year ago |
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sangwq
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44ec74603f
TM Transfer
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2 years ago |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
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sangwq
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
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2 years ago |
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sangwq
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241a8a2f5d
UPDATE 20230324
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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lixiang
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ccb4444fa8
添加部分ui按钮控制rt功能
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2 years ago |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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sangwq
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53e362a33e
update
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2 years ago |
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sangwq
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3cad102221
更新 RT
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2 years ago |
