 sangwq
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16f00701e5
Redesign Recipe module.
|
1 rok temu |
|
sangwq
|
f211c4242f
Efem module raw design.
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1 rok temu |
 lixiang
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de406b964e
1.添加EFEM等ui界面
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1 rok temu |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
1 rok temu |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
1 rok temu |
|
sangwq
|
6187ad5b4f
Interlock 优化
|
2 lat temu |
|
sangwq
|
46261ca338
enhance wafer manager.
|
2 lat temu |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 lat temu |
|
sangwq
|
a244b205b9
Gas Flow and RF Power routine.
|
2 lat temu |
|
sangwq
|
c3154ba629
wafer manager.
|
2 lat temu |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 lat temu |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 lat temu |
|
lixiang
|
ee80e1676c
解决冲突
|
2 lat temu |
|
sangwq
|
0606b882bc
process module 1215
|
2 lat temu |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 lat temu |
