 lixiang
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9fdde379d4
cooling加条件限制
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1 year ago |
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lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
 sangwq
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8a8ff0ced1
Fixed the cycle blocking bug with one wafer per cycle.
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1 year ago |
 kuangzl
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eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
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1 year ago |
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kuangzl
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7631216206
Improve the animation of SE Robot, modify Venus SE UI, complete casette load animation.
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1 year ago |
 chenkui
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83714d769e
add vce module SafeLoad/SafeUnload/Map function
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1 year ago |
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kuangzl
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f56adfe739
Upload missing code and remove the PM pressure display.
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1 year ago |
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chenkui
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25954d684c
update EquipmentVariables.xml and Secsgem dll
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1 year ago |
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kuangzl
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a971969e35
Modify the UI of VenusDE and fix the ReturnWafer Button.
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1 year ago |
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kuangzl
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cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
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1 year ago |
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sangwq
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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1 year ago |
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sangwq
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ed2162b82c
Fix the PreClean/PostClean disorder bug.
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1 year ago |
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sangwq
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09e8c5db30
Fix the post clean not running bug.
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1 year ago |
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sangwq
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260120e0d5
Change the PreClean/PostClean design.
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1 year ago |
 zhouhr
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4269c343ba
upload missing files..
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1 year ago |
|
zhouhr
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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1 year ago |
|
zhouhr
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eff7f8a03e
upload missing files
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1 year ago |
|
zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 year ago |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
 hecl
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4b1a37ee73
fix bugs
|
1 year ago |
|
hecl
|
f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
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1 year ago |
|
hecl
|
31019683d7
1.Venus MFCVerification UI enhance
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1 year ago |
|
lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
|
sangwq
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1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.
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1 year ago |
|
zhouhr
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01f4eaa5de
fix the bug in SEMFSwapRoutine
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1 year ago |
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sangwq
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da0e19a78e
enhance the error handling routine while PM offline.
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1 year ago |
|
sangwq
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1d60dcb593
Fix the bugs about Exclude/Include feature.
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1 year ago |
|
sangwq
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9d5c9aa491
Reset PMTask while after system abort.
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1 year ago |
|
zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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1 year ago |
|
lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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1 year ago |
