 sangwq
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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vor 1 Jahr |
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sangwq
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4f7a01400f
fix the sync issue for efem socket.
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vor 1 Jahr |
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sangwq
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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vor 1 Jahr |
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sangwq
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991036681f
enhance the duplicated wafer functions.
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vor 1 Jahr |
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sangwq
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52349cad2b
Duplicated wafer functions.
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vor 1 Jahr |
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sangwq
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e61f018b66
Manual Return wafer while running cycle.
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vor 1 Jahr |
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sangwq
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88b91b4ea3
fix routing bugs.
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vor 1 Jahr |
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sangwq
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73f0d306a7
Enhance routing algorithm.
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vor 1 Jahr |
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sangwq
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61173b6866
Added Auto Vent/Pump log for tracing trigger issue.
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vor 1 Jahr |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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vor 1 Jahr |
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sangwq
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75314148f5
Added Auto Pump/vent option.
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vor 1 Jahr |
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sangwq
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03063bae6a
Enhance the routine framework.
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vor 1 Jahr |
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sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
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vor 1 Jahr |
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sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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vor 1 Jahr |
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sangwq
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8f9b95ae8f
Develop transfer cycle.
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vor 1 Jahr |
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sangwq
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5fc13b3f0c
New Efem design
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vor 2 Jahren |
