 sangwq
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9d5c9aa491
Reset PMTask while after system abort.
|
10 months ago |
|
sangwq
|
1ff7394c30
Fix the ATM cycle blocking bug.
|
11 months ago |
|
sangwq
|
03770198be
Skip auto Vent/pump while ATM mode.
|
11 months ago |
|
sangwq
|
5d9198550f
Enhance the throughput with align sequence.
|
11 months ago |
|
sangwq
|
54ed40c8b1
enhance kepler throughput
|
11 months ago |
|
sangwq
|
82703d4497
enhance throughput with loadlock delay.
|
11 months ago |
|
sangwq
|
57281fce55
Enhance throughput while not pass by aligner.
|
11 months ago |
|
sangwq
|
f53fecc7bb
Enhance sequence aligner configurability
|
11 months ago |
|
sangwq
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
1 year ago |
|
sangwq
|
fe230ec531
Enhance throughput.
|
1 year ago |
|
sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 year ago |
|
sangwq
|
2de3872723
duplicated wafer function.
|
1 year ago |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 year ago |
 lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
sangwq
|
e8ae7ee302
fix the Loadlock path bug while fixed slot mode.
|
1 year ago |
|
sangwq
|
408e8f0786
enhance the throughput while loadlock is fixed slot pattern.
|
1 year ago |
|
sangwq
|
89d1b63b12
fix the bug which missing calling RouteTo on Vac side.
|
1 year ago |
|
sangwq
|
9cdf232cb1
Fix the routing bug for fixed slot Loadlock.
|
1 year ago |
|
sangwq
|
b11dfcec1e
Load configure value for Loadlock slot in out option.
|
1 year ago |
|
sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
sangwq
|
210098481b
fix the routing bug which missing calling RouteTo().
|
1 year ago |
|
sangwq
|
b85b9aa79f
fix some routing bugs.
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
 chenkui
|
d4a031af0e
1、change PortWaferstart/PortWaferEnd event to WaferArrived/WaferLeved event
|
1 year ago |
|
chenkui
|
563a30f852
1、add recipe event notify;
|
1 year ago |
|
sangwq
|
3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.
|
1 year ago |
|
sangwq
|
709c7a1c10
fixed the routing bug while B In B Out.
|
1 year ago |
|
sangwq
|
614fe9104b
Transfer PM wafer while PMTask status not update to idle.
|
1 year ago |
|
sangwq
|
78ec8de62c
fix the bug which pm wafer been transfer out without processed.
|
1 year ago |
