 sangwq
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970b052f18
keep on enhance throughput.
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1 year ago |
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sangwq
|
5687e44ebc
Enhance routing algorithm.
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1 year ago |
|
sangwq
|
3d62905adf
cycle number setpoint bug.
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1 year ago |
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sangwq
|
0c9d2dbd96
New routing algorithm for cooling function.
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1 year ago |
 lixiang
|
ced69ea3b9
新版本Recioeview界面开发
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1 year ago |
|
lixiang
|
652daaa81a
cycle uncheck bug修复
|
1 year ago |
|
lixiang
|
df2593530e
1.提交cycle功能
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1 year ago |
|
lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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1 year ago |
|
sangwq
|
5163d9153b
Fix the double place to lp bug while destinations are different loadports.
|
1 year ago |
|
sangwq
|
a81c73cdbf
Enhance Venus routing algorithm for clean task.
|
1 year ago |
|
sangwq
|
ec6ba70d8e
Parallel routing algorithm for kepler/venus.
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1 year ago |
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sangwq
|
5469baaa63
Parallel cycle mode
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1 year ago |
 zhouhr
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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1 year ago |
|
lixiang
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
lixiang
|
9fdde379d4
cooling加条件限制
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
sangwq
|
8a8ff0ced1
Fixed the cycle blocking bug with one wafer per cycle.
|
1 year ago |
 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
1 year ago |
|
kuangzl
|
7631216206
Improve the animation of SE Robot, modify Venus SE UI, complete casette load animation.
|
1 year ago |
 chenkui
|
83714d769e
add vce module SafeLoad/SafeUnload/Map function
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1 year ago |
|
kuangzl
|
f56adfe739
Upload missing code and remove the PM pressure display.
|
1 year ago |
|
chenkui
|
25954d684c
update EquipmentVariables.xml and Secsgem dll
|
1 year ago |
|
kuangzl
|
a971969e35
Modify the UI of VenusDE and fix the ReturnWafer Button.
|
1 year ago |
|
kuangzl
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
1 year ago |
|
sangwq
|
3b1932fced
Add Loadport loaded check while manual transfer wafer.
|
1 year ago |
|
sangwq
|
ed2162b82c
Fix the PreClean/PostClean disorder bug.
|
1 year ago |
|
sangwq
|
09e8c5db30
Fix the post clean not running bug.
|
1 year ago |
|
sangwq
|
260120e0d5
Change the PreClean/PostClean design.
|
1 year ago |
|
zhouhr
|
4269c343ba
upload missing files..
|
1 year ago |
|
zhouhr
|
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
|
1 year ago |
