 hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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1 éve%!(EXTRA string=óta) |
 zhouhr
|
ea68c5c25d
add clean for Venus SE.
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1 éve%!(EXTRA string=óta) |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 éve%!(EXTRA string=óta) |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
1 éve%!(EXTRA string=óta) |
|
zhouhr
|
8436daeb68
Eliminate SE generation warning.
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 éve%!(EXTRA string=óta) |
