 hecl
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996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
 zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 months ago |
 sangwq
|
f53fecc7bb
Enhance sequence aligner configurability
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11 months ago |
 lixiang
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7513d2e586
TM View 添加wafer
|
11 months ago |
|
lixiang
|
8d613c7d1f
奈思UI 新版动画
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11 months ago |
|
lixiang
|
6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
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11 months ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
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11 months ago |
|
hecl
|
09a72490a8
1.enhance Tru match logical
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11 months ago |
 intern02
|
df6a3ad304
upload Venus_MainPages.csproj and Venus_Themes.csproj.
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11 months ago |
|
intern02
|
7d6765cd44
Added and uploaded VenusDETMViewModel.cs, VenusDETMView.xaml, VCEleft1.png, VCEright1.png, detm.png, DEVceA.xaml, DEVceB.xaml, and VenusDETM.xaml.
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1 year ago |
|
zhouhr
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1d4d3733e5
fix the bug in DETMOperationView
|
11 months ago |
|
zhouhr
|
cc62abde94
fix some bug in DETMOperationView
|
11 months ago |
|
zhouhr
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662fb997fa
add DETMOperationView in UI
|
11 months ago |
|
zhouhr
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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11 months ago |
|
hecl
|
b7ebfa6adf
Add Tru match release stop mode command
|
1 year ago |
|
sangwq
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e806a46292
Enhance the EFEMM design for thread safe and throughput issues.
|
1 year ago |
|
sangwq
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
1 year ago |
|
zhouhr
|
9d5c55e2d2
fix the bug in SETMOperationView as offline.
|
1 year ago |
|
zhouhr
|
16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.
|
1 year ago |
|
zhouhr
|
28a7e74cc0
Let PVN22 open before PumpDown start in SE&DE.
|
1 year ago |
|
zhouhr
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
1 year ago |
|
hecl
|
4bebab5f8b
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 year ago |
|
lixiang
|
07b8ea7e19
让fdc只支持Process Type
|
1 year ago |
|
hecl
|
27c33aa98d
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 year ago |
|
lixiang
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
1 year ago |
|
hecl
|
4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
|
1 year ago |
|
lixiang
|
17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
|
1 year ago |
|
hecl
|
9a410e084a
fix exception:
|
1 year ago |
|
zhouhr
|
5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
|
1 year ago |
|
sangwq
|
4f7a01400f
fix the sync issue for efem socket.
|
1 year ago |
