 Intern01
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987f0abae5
1.Slove TuroN2Flow don't show problem
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1 year ago |
 lixiang
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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1 year ago |
 zhouhr
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bcc9d2faf8
1、Chamber add the waferID
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1 year ago |
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lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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1 year ago |
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zhouhr
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296cd4b8a4
1、recipe页面chuck、dechuck选项名称缩略并设置最大最小长度
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1 year ago |
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lixiang
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cb91599d02
修复recipe Ui信息显示
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1 year ago |
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lixiang
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f9a02a739a
添加pmc/kepler2200
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1 year ago |
