 sangwq
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12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
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1 year ago |
 chenkui
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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sangwq
|
dbb753dd44
Pause functionality.
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1 year ago |
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sangwq
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a80b5af3fd
enhance manual return wafer algorithm.
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1 year ago |
 zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
|
zhouhr
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
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1 year ago |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
|
zhouhr
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724b0ca304
add ReturnWafer for Venus SE.
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1 year ago |
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zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
|
sangwq
|
faa496c2b0
fix a routing bug for single PM sequence.
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1 year ago |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
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1 year ago |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
|
sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
|
2 years ago |
|
zhouhr
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f7228d247a
restore Venus TM Robot Simulator
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2 years ago |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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2 years ago |
|
zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
2 years ago |
|
zhouhr
|
1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
|
2 years ago |
 lixiang
|
3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 years ago |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
2 years ago |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
2 years ago |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
2 years ago |
|
sangwq
|
6a29fad5f9
update for unload/PMleakcheck bugs
|
2 years ago |
|
sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
2 years ago |
|
sangwq
|
3ee9634ad3
developing routing algorithm.
|
2 years ago |
|
sangwq
|
9f239420d8
improve the efem code.
|
2 years ago |
|
lixiang
|
85fc03f838
1.添加部分OpertionOverView ui功能
|
2 years ago |
|
sangwq
|
60d1bca02a
update cycle module, not finished.
|
2 years ago |
