 lixiang
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9231cab4b9
1.修改topView ui
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1 year ago |
|
lixiang
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7419cea99a
添加TMCycle动画（部分）
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1 year ago |
 sangwq
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f211c4242f
Efem module raw design.
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1 year ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
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sangwq
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44ec74603f
TM Transfer
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2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
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2 years ago |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
|
sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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2 years ago |
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sangwq
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
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sangwq
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241a8a2f5d
UPDATE 20230324
|
2 years ago |
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sangwq
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e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
|
2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
|
2 years ago |
