 zhouhr
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28a7e74cc0
Let PVN22 open before PumpDown start in SE&DE.
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11 months ago |
|
zhouhr
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
11 months ago |
 hecl
|
4bebab5f8b
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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11 months ago |
 lixiang
|
07b8ea7e19
让fdc只支持Process Type
|
11 months ago |
|
hecl
|
27c33aa98d
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
11 months ago |
|
lixiang
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
11 months ago |
|
hecl
|
4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
|
11 months ago |
|
lixiang
|
17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
|
11 months ago |
|
hecl
|
9a410e084a
fix exception:
|
11 months ago |
|
zhouhr
|
5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
|
11 months ago |
 sangwq
|
4f7a01400f
fix the sync issue for efem socket.
|
11 months ago |
|
hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
11 months ago |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
11 months ago |
|
zhouhr
|
cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
|
11 months ago |
|
lixiang
|
88fb4d096c
添加界面登出功能
|
11 months ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
11 months ago |
|
sangwq
|
cc43a1d632
enhance the EFEM driver.
|
11 months ago |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
|
11 months ago |
|
sangwq
|
337c20b54d
compatible with Venus.
|
11 months ago |
|
sangwq
|
7862a9be38
solve the sync problem while set signal tower light.
|
11 months ago |
|
lixiang
|
75dbbd4da8
添加KeplerSignaltower功能
|
11 months ago |
|
hecl
|
3bf4e310a3
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
11 months ago |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
11 months ago |
|
sangwq
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
11 months ago |
|
sangwq
|
fe230ec531
Enhance throughput.
|
11 months ago |
|
lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
11 months ago |
|
hecl
|
f501000473
1.Fix Tru RF/match bugs
|
11 months ago |
|
sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
11 months ago |
|
sangwq
|
991036681f
enhance the duplicated wafer functions.
|
11 months ago |
|
sangwq
|
36473578f9
Fixed the duplicated wafer bug.
|
11 months ago |
