 sangwq
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9189e1b51f
new routing algorithm update.
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1 year ago |
 chenkui
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c5f00f1310
1、增加了Unload complete后的FA事件通知
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1 year ago |
|
chenkui
|
5740a76224
1、ControlJobInfo类增加了SequenceNameList,解决LoadPort UI中Sequence显示问题
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1 year ago |
|
chenkui
|
4359bcf776
1、修复了AbortJob无法选择Sequence的问题
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1 year ago |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
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1 year ago |
 lixiang
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f74076f457
1.修复LP3不能create job，ui界面显示错误的bug
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1 year ago |
|
lixiang
|
17793fef54
kepler2300 PM界面添加Include/Exclude功能
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1 year ago |
|
lixiang
|
9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
|
chenkui
|
5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
|
lixiang
|
f09d7d1b15
分开所有系列配置文件
|
1 year ago |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
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1 year ago |
|
sangwq
|
c3ef1d5a6e
Wafer loadlock delay function.
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1 year ago |
 hecl
|
2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
|
chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
|
1 year ago |
|
sangwq
|
db34e04302
missing SystemDispatcher.cs
|
1 year ago |
|
sangwq
|
20606c1ffb
check in new routing algorithm code.
|
1 year ago |
|
lixiang
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 year ago |
|
hecl
|
d331213da1
1.SETM Pressure Control update
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1 year ago |
|
hecl
|
e1a8bb6663
1.remove SETM mbar to mtor
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 year ago |
|
hecl
|
49401d4b6e
1.Fix busgs
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1 year ago |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
hecl
|
4c8cdc5b4a
1.Update Venus SE IO
|
1 year ago |
|
hecl
|
dbe33e8d29
Venus DE ui&viewmodel update
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1 year ago |
|
hecl
|
c188b4cbbc
GasLeakCheckViewModel Update
|
1 year ago |
|
lixiang
|
95f5be1ca4
1.修复iomfc writemode的合并冲突bug
|
1 year ago |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 year ago |
|
lixiang
|
6a4c179557
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
|
1 year ago |
