 lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
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lixiang
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f09d7d1b15
分开所有系列配置文件
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1 year ago |
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lixiang
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
 sangwq
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052baa3ed3
fix the clear error command confirm sequence problem and PM pressure bug.
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1 year ago |
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sangwq
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8567277de8
typing error.
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1 year ago |
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sangwq
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d89a4c81f9
Enhance Routing algorithm and simulator configure file path.
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1 year ago |
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sangwq
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2b930e56b9
Log output for exception.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
