 lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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5 months ago |
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lixiang
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a9d8e56970
1.扩展alarm list
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7 months ago |
|
lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 months ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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11 months ago |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
 zhouhr
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a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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1 year ago |
 sangwq
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03063bae6a
Enhance the routine framework.
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1 year ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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1 year ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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096c873956
Sequence SPEC update.
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2 years ago |
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lixiang
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1f1fb71be3
1.2023/02/17现场rt代码修改
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2 years ago |
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sangwq
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847220c6ce
update for initial recipe design
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2 years ago |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 years ago |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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sangwq
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a5245356d0
source files
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2 years ago |
