 lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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5 mēneši atpakaļ |
|
lixiang
|
a9d8e56970
1.扩展alarm list
|
7 mēneši atpakaļ |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
10 mēneši atpakaļ |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
11 mēneši atpakaļ |
 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 gadu atpakaļ |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 gadu atpakaļ |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 gadu atpakaļ |
 zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
1 gadu atpakaļ |
 sangwq
|
03063bae6a
Enhance the routine framework.
|
1 gadu atpakaļ |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 gadu atpakaļ |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
1 gadu atpakaļ |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 gadi atpakaļ |
|
sangwq
|
096c873956
Sequence SPEC update.
|
2 gadi atpakaļ |
|
lixiang
|
1f1fb71be3
1.2023/02/17现场rt代码修改
|
2 gadi atpakaļ |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 gadi atpakaļ |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 gadi atpakaļ |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 gadi atpakaļ |
|
sangwq
|
a5245356d0
source files
|
2 gadi atpakaļ |
