 zhouhr
|
b6309f712c
upload for Venus SE/DE
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hai 5 meses |
|
zhouhr
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
hai 11 meses |
|
zhouhr
|
5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
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hai 11 meses |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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hai 11 meses |
|
zhouhr
|
cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
|
hai 11 meses |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
|
hai 11 meses |
|
zhouhr
|
93fd866dbe
update SMCChillerDrive && SMCShareChiller
|
hai 1 ano |
