 lixiang
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2cdc13a01b
1.Venus与Kepler 代码分开
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3 months ago |
 zhouhr
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b6309f712c
upload for Venus SE/DE
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5 months ago |
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lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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6 months ago |
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lixiang
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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6 months ago |
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lixiang
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a9d8e56970
1.扩展alarm list
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7 months ago |
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lixiang
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65d80057c2
ui优化
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8 months ago |
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lixiang
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99d939492e
1.加登出界面
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8 months ago |
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lixiang
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ced69ea3b9
新版本Recioeview界面开发
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9 months ago |
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zhouhr
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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zhouhr
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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9 months ago |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 months ago |
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lixiang
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9163903164
Kepler2200优化
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10 months ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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10 months ago |
 hecl
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0f361d7301
1.Fix SETM robot ArmExtend bugs
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10 months ago |
|
hecl
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996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
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lixiang
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52e8bd8f7a
1.优化Home断开重连
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11 months ago |
|
hecl
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9d28f8ee7d
1.Add Tru match
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11 months ago |
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lixiang
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01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
|
hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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lixiang
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0f905564d0
加入登录界面和权限管理
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1 year ago |
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lixiang
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
|
lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
|
lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
