 sangwq
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e61f018b66
Manual Return wafer while running cycle.
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hai 1 ano |
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sangwq
|
0a0308458e
Enable drag wafer while module offline.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
6ffcff679e
Enhance throughput.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
3e445737a6
Align functions.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
501997ac38
TM/EFEM robot single arm option.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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%!s(int64=2) %!d(string=hai) anos |
 lixiang
|
e0817cb012
现场bug修改
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
|
587a0094b4
fix logic error.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
2b6f4986f3
fix Efemrobot scheduler bug.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
8d21b41b42
AutoCycle enhancement.
|
%!s(int64=2) %!d(string=hai) anos |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
3ee9634ad3
developing routing algorithm.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
d900c241bd
开发 AutoCycle 模块， 进行中
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
%!s(int64=2) %!d(string=hai) anos |
