 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
 zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
|
zhouhr
|
e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
|
hecl
|
58b65c3ff0
VenusSE Simulator PM Update
|
2 years ago |
|
hecl
|
5396e84cfe
VenusSE TM io simulator update
|
2 years ago |
|
hecl
|
afc3b9494f
VenusSE TM pressurecontrol update
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2 years ago |
 Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
2 years ago |
