 sangwq
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81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
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9 months ago |
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sangwq
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e12c5e5a93
fixed the blocking bug while return wafers.
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9 months ago |
 chenkui
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4edd963b4b
update S2F13 ECID
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9 months ago |
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sangwq
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d449c55208
Force Loadlock cooling while return wafer.
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9 months ago |
 lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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9 months ago |
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chenkui
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e874919d1b
update ECID
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9 months ago |
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chenkui
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9c5f7f760b
修复LP.State状态取至IsLoaded
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9 months ago |
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chenkui
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665c6d15f7
增加了Loadport AccessModel和State
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9 months ago |
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chenkui
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9332919378
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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9 months ago |
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lixiang
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8e660cd7a8
1.去除carrierid ;字符
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9 months ago |
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chenkui
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b7e39609e8
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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9 months ago |
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chenkui
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9e1392f800
update eap dll
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9 months ago |
|
lixiang
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d6b8d32004
1.修复不能跑atm模式的bug
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9 months ago |
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lixiang
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a9d8e56970
1.扩展alarm list
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9 months ago |
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chenkui
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f93181401a
upload kelper warning id
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9 months ago |
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chenkui
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c7f9243ef5
add S1F11,S1F15,S1F17 and S2F29 command & add client connection log
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9 months ago |
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sangwq
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a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
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10 months ago |
|
lixiang
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3dd6dc62ed
修复OperationView PM显示错误bug
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10 months ago |
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sangwq
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a5826caf14
Pre/Post Lot Clean functionality.
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10 months ago |
|
lixiang
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e29f6e8e46
1.优化UI界面性能
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10 months ago |
|
lixiang
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46d2717838
1.Gas Leak Check 加上Penning Guage信号显示
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10 months ago |
|
lixiang
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5e9ddc918f
优化SequenceView界面
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10 months ago |
|
lixiang
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abc6ebc8ff
修复Topview显示不正确bug，添加给eap穿eventenum功能
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10 months ago |
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lixiang
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79ffe0c064
1.分开Kepler与Venus SequenceView界面
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10 months ago |
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lixiang
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6794b3d2d7
修复Sequence View bug
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10 months ago |
|
lixiang
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1c62310360
修复Suquence打开修改界面报空bug
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10 months ago |
|
lixiang
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477c4954ad
1.添加CarrierId
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10 months ago |
|
lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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10 months ago |
|
lixiang
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bfd7d2def6
手动添加冲突bug 代码
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10 months ago |
|
lixiang
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1c2b8b53bb
1.添加用户权限功能
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10 months ago |
