 lixiang
|
6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
|
1 year ago |
|
lixiang
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 year ago |
 hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
2 years ago |
|
lixiang
|
c457973fa2
1.添加Revtech Match
|
2 years ago |
 sangwq
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
lixiang
|
93b4531b7b
robot 不能home问题提交
|
2 years ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
|
2 years ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 years ago |
|
sangwq
|
c4864f5546
debug gas verification.
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
