 lixiang
|
f92e6abb17
1.添加Kepler2300 功能代码
|
9 months ago |
|
lixiang
|
6ec37ea42c
1.与Venus分开，删除冗余代码
|
10 months ago |
|
lixiang
|
1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
|
11 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 months ago |
 zhouhr
|
b6309f712c
upload for Venus SE/DE
|
1 year ago |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
1 year ago |
|
lixiang
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
1 year ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
1 year ago |
|
lixiang
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
|
1 year ago |
|
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 year ago |
|
lixiang
|
ced69ea3b9
新版本Recioeview界面开发
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
1 year ago |
|
lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
1 year ago |
 hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
1 year ago |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
1 year ago |
|
lixiang
|
c671c999c0
ui界面优化
|
1 year ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
1 year ago |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
1 year ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
1 year ago |
|
lixiang
|
07b8ea7e19
让fdc只支持Process Type
|
1 year ago |
|
lixiang
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
1 year ago |
|
lixiang
|
17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
|
1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
|
1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
 chenkui
|
563a30f852
1、add recipe event notify;
|
1 year ago |
