 hecl
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0b8a98a845
IoDevice IoMagnet Add
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1 year ago |
 chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
 lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
08e85396fc
1.添加eventview分页功能
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1 year ago |
|
lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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2 years ago |
 zhouhr
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ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
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2 years ago |
|
lixiang
|
edb5ad6960
1.添加数据分析 Recipe step功能
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2 years ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
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2 years ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
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2 years ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
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2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
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2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
|
lixiang
|
2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 years ago |
 sangwq
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9760d40cf7
port simulator
|
3 years ago |
|
sangwq
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56cd0ab611
add framework
|
3 years ago |
